Nano silica diaphragm in-fiber cavity for gas pressure measurement
نویسندگان
چکیده
منابع مشابه
Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement.
We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of ∼320 nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry-Perot interferometric pressu...
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A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector, which, in conjunction with the reflection at the fiber end-air interface, forms a low finesse Fabry-Perot interferometer. The graphene based sensor demonstrated pressure sensitivity over 39.4 nm/kPa with a diaphragm diameter of 25 μm. The use of...
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The prmclple of measurmg pressure by means of a resonant diaphragm has been studled An oscillator conslstmg of an integrated amphfler with a plezoelectrlcally driven diaphragm m its feedback loop has been bullt The oscillator frequency 1s accurately proportional to the square of the pressure m the range 60 to 130 Torr The frequency range 1s 1324 to 1336 Hz (this range being limited by a spuriou...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2017
ISSN: 2045-2322
DOI: 10.1038/s41598-017-00931-0